Monovat Gate Valves

MONOVAT^® gates fitted with Perlast^®, Kimura^® and Nanofluor^® elastomer seals deliver improved performance

MONOVAT^® gates are widely used on semiconductor tool platforms. MONOVAT^® gates fitted with PPE’s unique Perlast^®, Kimura^® and Nanofluor^® semiconductor grade elastomers deliver reduced particulation, improved yield and reduced cost of ownership.

Features of MONOVAT^® Gates fitted with PPE materials:

• Available in various sizes and profiles for different semiconductor manufacturing platforms.
• A broad range of seal profiles designed to reduce localized stresses, resulting in improved seal performance and life time
• Highest levels of plasma and chemical resistance
• Ultra-pure elastomers minimize particulation in processing environments

Case Study Perlast^® G67P on MONOVAT^® achieved x3 increase in wafer yield

A major semiconductor manufacturer in Asia was experiencing problems with contamination and poor wafer yield in a Low-K CVD process on a Producer^® tool. The dynamic MONOVAT^® gates were fitted with a traditional white FFKM material and the gates had to be replaced every 15,000 - 30,000 wafers. 

Since using MONOVAT^® gates fitted with Perlast^® G67P, this chip producer achieves over 90,000 wafers, which represents a considerable cost saving. This reflects the ultra-pure material composition, superior chemical resistance and outstanding mechanical properties of Perlast^® materials.

How can we help?  Contact us with your MONOVAT gate requirements.

MonoVat^® is a registered trademark of VAT Vakuumventile AG.